Molecular dynamics simulation of structural properties in amorphous HfO2 under cooling process

Thoan H. Nguyen,Vinh V. Le,Trung N. Nguyen
DOI: https://doi.org/10.1016/j.vacuum.2018.12.028
IF: 4
2019-03-01
Vacuum
Abstract:Molecular dynamics simulation of amorphous HfO2 has been carried out to investigate the structural properties with the different cooling rate. The fractions of HfOx (x = 5, 6, and 7) structural units change slightly with the change of the cooling rate. We found that almost corner-sharing bonds appear in the HfO5-HfO5 connectivities, whereas corner-, edge- and face-sharing bonds appear in the HfO6-H-HfO6 and HfO7-HfO7 connectivities. The number of oxygen (O) edge-sharing atoms increases whereas the one of O face-sharing atoms decreases with the decrease of the cooling rate. Void analysis indicated that a significant number of O-voids, in which void contacted with four O atoms, exist in the a-HfO2 samples. These O-voids gather and overlap together into O-void clusters. The largest voids belong to these O-voids and the largest radius of voids increases with increasing the cooling rate. Oxygen atoms in the form of the hexagonal close packed (hcp) structure are found in the samples with the cooling rate of 66.67, 33.33 and 6.67 K/ps, while both of O hcp and faced centered cubic (fcc) clusters are found in the sample with the cooling rate of 3.33 K/ps.
materials science, multidisciplinary,physics, applied
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