Abstract:Ultrasonic elliptical vibration cutting (UEVC) is a processing technology developed for ultra-precision in recent years.Its structure design is one of difficulties in current research.Based on the analysis of the current UEVC devices,a different UEVC that uses the circular flexure hinge was designed in this paper.Modal analysis of the device was carried out using finite element method (FEM) to identify the key structural parameters that affect the resonant frequencies.Its structure was optimized by the global optimization module to ensure that the resonant frequen-cies of the longitudinal and flexural vibration modal are the same.In addition,multi-field coupled analysis was performed to predict the motion tra-jectory of the tool tip in different phase shift.FEM results indicated that length of the back cylinder greatly affects the resonant frequency of lon-gitudinal and flexural vibration modal,while the thickness of the base had almost no effect on the resonant frequency,and length of the tip slightly affects the resonant frequency.Based on the FEM analysis and optimization,a prototype of UEVC device was fabricated.Its resonant frequency and vibration characteristics were measured by an impedance analyzer.Experimental results showed that the measured resonant frequency correlates well with the simulated one.Therefore,the designed UEVC device can generate elliptical trajectory at the resonant frequency.In addition,the vibra-tion trajectory can be tuned by adjusting the phase shift and the amplitude of the applied voltage,which enables the machining of micro-structured surface on the brittle material.Besides,when alternating current is applied to the UEVC device, and the frequency of the current equals to the res-onant frequency of the device.The amplitude of the longitudinal and flexural vibration linearly increases with the amplitude of the voltage.Never-theless,the flexural vibration is more sensitive to the change of the voltage than the longitudinal vibration.

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