Longitudinal Spatial Coherence Analysis Based on the Interpretation of the Fringes of Equal Thickness and its Practical Application for the Surface Profilometry

段志辉,Golkher Mark,Joseph Rosen,小琦宽和,石进信生,武田光夫,张青川
DOI: https://doi.org/10.3969/j.issn.1001-4888.2002.04.003
2002-01-01
Abstract:Based on the interpretation for the fringes of equal thickness, we proposed the two dimensional longitudinal spatial coherence function. By manipulating the irradiance of an extended quasi-monochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for a specified location along the optical propagation axis and a specified inclination between the two mirrors. We proved the feasibility of the proposed principle for the application through measuring a real object with the standard step. In particular, we proposed a new phase shift technique without mechanical movement. The quantitative experimental proof of the principle is presented.
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