Abstract:Ultra-low noise lasers are essential tools in a wide variety of applications, including data communication, light detection and ranging (LiDAR), quantum computing and sensing, and optical metrology. Recent advances in integrated photonics, specifically the development of ultra-low loss silicon nitride (Si$_3$N$_4$) platform, have allowed attaining performance that exceeds conventional legacy laser systems, including the phase noise of fiber lasers. This platform can moreover be combined with monolithic integration of piezoelectrical materials, enabling frequency agile low noise lasers. However, this approach has to date not surpassed the trade-off between ultra-low frequency noise and frequency agility. Here we overcome this challenge and demonstrate a fully integrated laser based on the Si$_3$N$_4$ platform with frequency noise lower than that of a fiber laser, while maintaining the capability for high-speed modulation of the laser frequency. The laser achieves an output power of 30 mW with an integrated linewidth of 4.3 kHz and an intrinsic linewidth of 3 Hz, demonstrating phase noise performance that is on par with or lower than commercial fiber lasers. Frequency agility is accomplished via a monolithically integrated piezoelectric aluminum nitride (AlN) micro-electro-mechanical system (MEMS) actuator, which enables a flat frequency actuation bandwidth extending up to 400 kHz. This combination of ultra-low noise and frequency agility is a useful feature enabling tight laser locking for frequency metrology, fiber sensing, and coherent sensing applications. Our results demonstrate the ability of 'next generation' integrated photonic circuits (beyond silicon) to exceed the performance of legacy laser systems in terms of coherence and frequency actuation.

Study on the Properties and Suppression of the Intensity Noise in Semi-Nonplanar Monolithic Lasers

Abnormal Intensity Noises of LD-pumped Microchip Nd∶ YAG Laser

Relative Intensity Noise Comparison of Fiber Laser and Amplified Spontaneous Emission Sources

Principles, Measurements and Suppressions of Semiconductor Laser Noise-A Review

Laser Intensity Noise Suppression for Preparing Audio-Frequency Squeezed Vacuum State of Light

Influence of the pump scheme on the output power and the intensity noise of a single-frequency continuous-wave laser

Suppression of low-frequency intensity noise using PLZT based high speed VOA

Noise Suppression of Relaxation Oscillation Intensity in a Microcavity Raman Laser

Study on green problem of LD-pumped intracavity-doubled Nd:YVO4/KTP green lasers

Noise Characteristics of LDA Pumped Laser by Intracavity Sum-Frequency Generation with LBO

Amplitude noise suppression in Yb:doped NALM oscillators utilizing saturable absorber settings.

Intensity Noise Reduction Technique of Fiber Laser Via Intracavity Soa Structure

High-efficiency 1064 nm nonplanar ring oscillator Nd:YAG laser with diode pumping at 885 nm

Methodological investigation into the noise influence on nanolasers' large signal modulation

Dynamical Properties of Total Intensity Fluctuation Spectrum in Two-Mode Nd:YVO 4 Microchip Laser

Monolithic piezoelectrically tunable hybrid integrated laser with sub-fiber laser coherence

Intensity noise suppression in mode-locked fiber lasers by double optical bandpass filtering

All-optical frequency and intensity noise suppression of single-frequency fiber laser

The $π$, $K^+$, and $K^0$ electromagnetic form factors

Flexible all-PM NALM Yb:fiber laser design for frequency comb applications: operation regimes and their noise properties

Model of Small-Scale Self-Focusing and Spatial Noise in High Power Laser Driver