Local charging effect on metal surface induced by low energy focused electron beam

Dong-zheng CHEN,Rui ZHU,Jun XU
DOI: https://doi.org/10.3969/j.issn.1000?6281.2018.03.007
2018-01-01
Abstract:Low energy electron beams have important applications onmicroscaleand even nanoscale imaging and analysis. To explore deeper mechanisms of applications, the interactions between a low energy beam and metal surface are studied. It was found that the transmission currents would decay with time byhigh current density electron beams with low energy when the total scattered electron yield was greater than 1. The physical mechanism of the decay was investigated with a micro?electron?hole recombination model. Incident electrons couldexcite long lifetime holes on metal surface, and the holes wouldinduce the decayof the transmission current. It was speculated that the defects and adsorptions on metal surface would increase the lifetime of the excited holes and reduce the electron?hole recombination rate, which led to local charges accumulationonthe metal surface. In macroscopic scale, it could be observed that the electron emission rate and the transmission current decayed with time.
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