E-beam Induced Carbon Nanowires in TEM

WANG Ming-sheng,WANG Jing-Yun,CHEN Qing,PENG Lian-mao
DOI: https://doi.org/10.3969/j.issn.1000-6281.2005.01.003
2005-01-01
Abstract:The electron beam induced deposition (EBID) technique, which is usually done in scanning electron microscope (SEM), has just introduced in transmission electron microscope (TEM) within these two years. EBID is a promising method to make controllable nanostructures. Comparing with focused ion beam (FIB), EBID is able to get finer structures, while cause less damage on samples. In this paper, various depositions such as carbon nanowires and carbon particles were made in a conventional TEM. The depositing process was in situ observed by TEM, and the influence of e-beam size, shape and irradiation time on the shape of depositions were summarized. Potential future applications of amorphous carbon wires made by EBID were discussed.
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