Non-linear Effect of Secondary Ion Emission Induced by Energetic Clusters

SHI Ping,DING Fu-Rong,WANG Yao,NIE Rui,MA Hong-Ji
DOI: https://doi.org/10.3969/j.issn.1007-4627.2005.02.007
2005-01-01
Abstract:Using energetic cluster as projectile is a unique way to produce simultaneous impacts of several atoms and deposit extremely high energy density in a very small area. The cluster impingement on solids has exhibited some non-linear effects not presented in collisions of individual atoms with those solids. The study of the secondary ion emissions can give insight into the energy deposition and relaxation steps of the cluster-solid interaction. The dependence of the yields of secondary ion emission induced by clusters on the energy of clusters, cluster sizes, charge states and material structures of the targets was reviewed in this paper.
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