The influence of non-conductive sample SEM images under different acceleration voltage

Shuiliang CAO,Zhihong LIANG,Pinghe YIN
DOI: https://doi.org/10.11778/j.jdxb.2014.04.004
2014-01-01
Abstract:To study the secondary electron(SE)images and energy selective backscattered(EsB)e-lectron images of atomic force microscope(AFM)probe and polystyrene balls under different acceleration voltage,Zeiss ultra55 field emission scanning electron microscopy(FSEM)was used.The results showed that samples could be directly observed under proper low acceleration voltage without sputtering gold film. The SE images had more surface details and more clearly images;EsB images had obvious composition contrast;Also,it could eliminate the charge effect and all kinds of pseudomorphs effectively.
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