Study on Sensitive Structure of Graphene Resonant Pressure Sensor

Shangchun FAN,Jin ZHANG,Liming ZHU
DOI: https://doi.org/10.13705/j.issn.1671-6833.2019.06.011
2019-01-01
Abstract:In this paper, a harmonic oscillator with a graphene material as a beam was designed with reference to a silicon resonant pressure sensor. The theoretical analysis and finite element simulation of the harmonic os-cillator were carried out and the working mechanism was revealed. Moreover, the influence of the structural pa-rameters of the resonator on the sensitivity was explored. The simulation results showed that the sensitivity not only decreased with the thickness of the silicon film and the length of the beam, but increased with the in-crease of the length and depth of the groove. Further, the preparation of graphene, the transfer and adsorption of graphene, the graphene High-precision cutting, and other harmonic oscillator processing technology were studied.
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