Nonlinear Dynamics of Folded-Mems Comb Drive Resonators with Time-Delayed Control

ZHANG Qichang,REN Huan,HAN Jianxin
DOI: https://doi.org/10.13465/j.cnki.jvs.2016.14.007
2016-01-01
Abstract:A time-delayed velocity feedback was made in use in the DC and AC driving voltage of folded-MEMS comb drive resonators and a single degree of freedom model of the folded-MEMS comb drive resonators under the influence of time-delayed control was presented.The expression of the electricity driving force,recieving the velocity feedback under the condition of small vibration amplitude,was approximated with the Taylor expansion.The method of multiple-scales was used to obtain the amplitude-frequency response equation of the system under the influence of time-delay parameters.The change of time-delayed parameters may result in jumping phenomena in the nonlinear vibration of the system when the driving frequency is in the vicinity of resonance frequency.The resonance frequency and nonlinear characteristics of softening or hardening will vary under conditions with different physical parameters such as DC and AC voltages.The stability region and vibration amplitude of the system with different physical parameters can be controlled by changing the time-delay parameters.It is concluded that the positive time-delayed control gain makes the system instable and the negative time-delayed control gain leads to the disappearance of jumping phenomenais,which was verified by the numerical computations.
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