Study on the Calibration Method of the Tip Area Function of the Nanoindenter at Super Low Depth

Xin-wei WANG,Xing-fu TAO,Xu LI,Zhi-yong HE,Ling-ling REN
DOI: https://doi.org/10.3969/j.issn.1000-1158.2017.05.16
2017-01-01
Abstract:Three methods are used to calibrate the tip area function of the nanoindenter at super low indentation depth,there are direct method based on atomic force microscope,spherical surface fitting method and indirect method based on the measurement results of the reference block of fused silica.It was revealed that tip area function calibrated by the direct method is mostly reliable and precise,of which the geometry morphology of the top end of the nanoindenter tip was truly fitted.Moreover,the corresponding mathematical model was established to analysis the main error of the AFM method,which was the error caused by the curvature radius of the atomic force microscope tip.The results show,under the super low indentation depth,the relative error of the tip area function of the nanoindentation is increasing with the decrease of indentation depth,which is mainly due to the curvature radius of the atomic force microscope tip.
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