Laser Technology of Composing Nano-materials

WANG Siyu,HUANG Chuyun,Xiong Weihao

DOI: https://doi.org/10.3969/j.issn.1005-8192.2005.04.008

2005-01-01

Abstract:The laser technology in fabrication of nano-materials is summerized. The emphases are laser ablation principle and status quo in fabrication of nano-particle, nano-fibre, nano-thin film.

What problem does this paper attempt to address?

High Throughput Laser Nano Direct Writing Technique

Liu Xu,Kuang Cuifang

DOI: https://doi.org/10.3788/AOS202242.1714005

2022-01-01

Acta Optica Sinica

Abstract:Laser direct writing (LDW) technique has been widely used in various scientific fields because of its flexible 3D micro/nano-structure processing and manufacturing capability. Due to the diffraction limit, it is challenge to get sub 100 nm or sub 50 nm resolution and realize high throughput 3D nano-manufacturing, which is critical important for the integrated circuit industrial applications in the post-Moore law period. From the perspective of optical imaging, it is concerning with superresolution imaging with large field of view, i. e. maximum throughput spatial passhand product. LDW technique focuses on writing with high throughput and high resolution. This paper will expound on the development of the LDW technique and introduce our research group's progress in the high throughput LDW technique.
Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Min Wang,Zhiwei Fang,Jia Qi,Junxia Zhou,Zhe Wang,Rongbo Wu,Renhong Gao,Ni Yao,Sanaul Haque,Saeed Farajollahi,Jintian Lin,Wei Fang,Tao Lu,Wei Chu,Ya Cheng

DOI: https://doi.org/10.1117/12.2585248

2021-01-01

Abstract:We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.
Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Applications of Laser Technology in Materials Science

WANG Sai-yu,XIONG Wei-hao

DOI: https://doi.org/10.3969/j.issn.0254-6051.2005.07.011

2005-01-01

Abstract:The application and development of laser technique in advanced manufacturing technologies such as nano-materials fabrication,materials surface modification and materials forming were summarized comprehensively.The laser ablation principle and outstanding advantage in nano-particle and nano-film preparation,as well as laser quenching,laser cladding and laser surface alloying were presented.The advanced laser solid forming technology and its current application status were introduced briefly.
Laser nano-technology of light materials: Precision and opportunity

Zhiyun Ye,Molin Su,Jianing Li,Cainian Jing,Shubo Xu,Liqiang Liu,Guocheng Ren,Xiaolin Wang

DOI: https://doi.org/10.1016/j.optlastec.2021.106988

2021-07-01

Abstract:<p>This review discusses the main factors of the formation mechanism of the laser fabricated nano-materials, focusing on the precision microstructures, mechanical properties, biocompatibility, also the research status. Laser nano-technology (LNT), that is, the precision nano-particle/structure/texture can be produced in the light alloys under an action of the laser beam, which can effectively improve the properties of the light alloys, mainly including the laser cladding (LC), selective laser melting (SLM) and laser shock peening (LSP) nano-technology. The trend of development of LNT is discussed, which includes: the preparation of the nano-gradient, the amorphous, the quasicrystalline light materials, the smart nano-materials, the connection of LNT and other techniques. Taking full use of the opportunities for the nano-materials produced by LNT to enlarge the applications of the light alloys also overcome the series of the scientific/technological issues in the coming future.</p>

optics,physics, applied
The Fabrication of Micro/Nano Structures by Laser Machining

Liangliang Yang,Jiangtao Wei,Zhe Ma,Peishuai Song,Jing Ma,Yongqiang Zhao,Zhen Huang,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/nano9121789

IF: 5.3

2019-12-16

Nanomaterials

Abstract:Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Lili Zhao,Zhen Liu,Duo Chen,Fan Liu,Zhiyuan Yang,Xiao Li,Haohai Yu,Hong Liu,Weijia Zhou

DOI: https://doi.org/10.1007/s40820-020-00577-0

2021-01-01

Abstract:Abstract Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical purposes. In the past decade, laser as a synthetic technique and laser as a microfabrication technique facilitated nanomaterial preparation and nanostructure construction, including the laser processing-induced carbon and non-carbon nanomaterials, hierarchical structure construction, patterning, heteroatom doping, sputtering etching, and so on. The laser-induced nanomaterials and nanostructures have extended broad applications in electronic devices, such as light–thermal conversion, batteries, supercapacitors, sensor devices, actuators and electrocatalytic electrodes. Here, the recent developments in the laser synthesis of carbon-based and non-carbon-based nanomaterials are comprehensively summarized. An extensive overview on laser-enabled electronic devices for various applications is depicted. With the rapid progress made in the research on nanomaterial preparation through laser synthesis and laser microfabrication technologies, laser synthesis and microfabrication toward energy conversion and storage will undergo fast development.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Chen, Qi-Dai,Xia, Hong,Yong-Lai Zhang,Sun, Hong-Bo

DOI: https://doi.org/10.1109/cleoe.2011.5943341

2011-01-01

Abstract:Femtosecond laser micronanofabrication has been considered as a promising approach for complicated device fabrication in versatile fields due to its intrinsic three-dimensional (3D) prototyping capability and reasonably high fabrication accuracy up to tens of nanometers. However, the unique features haven't been fully demonstrated yet so far. Our research in the passed several years has been focused in exploring applications of delicate technology in micro-optics, microelectronics, micromachines and microfluidics. Significant progress has been achieved. Successful examples include but not limited to aspheric microlens arrays with 100% filling ratio and numerical aperture as high as 0.5, nonplanar metal nanowiring technology, flexible circuits of graphene, remotely magnetically controllable micromachine, and microfilter and microturbines for microfluidic channels. Details on the fabrication and characterizations on these devices will be presented.
Laser-based Micro/nanofabrication in One, Two and Three Dimensions

Wei Xiong,Yunshen Zhou,Wenjia Hou,Lijia Jiang,Masoud Mahjouri-Samani,Jongbok Park,Xiangnan He,Yang Gao,Lisha Fan,Tommaso Baldacchini,Jean-Francois Silvain,Yongfeng Lu

DOI: https://doi.org/10.1007/s12200-015-0481-3

2015-01-01

Frontiers of Optoelectronics

Abstract:Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.
Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Feng Chen,Qing Yang,Hao Bian,Jiale Yong,Guangqing Du

DOI: https://doi.org/10.1109/cleoe-eqec.2017.8087747

2017-01-01

Abstract:Due to their low-cost, comparable transparency and ease of preparation, polymers are widely used to fabricate various micro- and nano-structures for their applications in micro-optics, micro-fluidics, biomedical systems and so on. And in recent years, femtosecond (fs) laser direct writing process has become a popular tool to fabricate arbitrary three-dimensional (3D) microstructures with nanometer accuracies. Here we present fabricating polymer micro- and nano-structures via femtosecond laser. The tunable adhesive superhydrophobic surfaces achieved by femtosecond laser microprocessing may be potentially used in microfluidic systems to modulate the mobility of liquid droplets.
Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Bian Yucheng,Wang Yulong,Xiao Yi,Zhang Yinghui,Jiao Yunlong,Wu Dong,Zhou Chenggang,Yao Chengli

DOI: https://doi.org/10.3788/LOP57.111406

2020-01-01

Laser & Optoelectronics Progress

Abstract:Compared to traditional processing methods and other advanced micro/nano processing methods, femtosecond laser direct writing technology has certain advantages in controllable micro/nano processing, such as no mask, suitable for any material, and small thermal effect. Therefore, it is always used to prepare bionic micro/nano structure surfaces for applications in various fields such as self-cleaning, oil-water separation, and water mist collection. The formation mechanism and design ideas of preparing various micro/nano structures on different materials by femtosecond lasers arc analyzed, and the latest research progress on the preparation of the bionic micro/nano structure surfaces by femtosecond laser is summarized. Then, the related concepts and theoretical models of surface wettability, controllable preparation of various micro/nano structures by femtosecond laser, and related industrial applications arc explored. Finally, the difficulties and challenges of femtosecond laser processing technology in the field of micro/nano manufacturing arc analyzed, and its future development in related fields is prospected.
Laser-Guided Direct Writing Technology for Material Particles

YAN Yong-nian,CHEN Li-feng,LIN Feng,WU Ren-dong

IF: 17.694

2004-01-01

NanoScience and Technology

Abstract:Laser-Guided Direct Writing technology can be used to assemble micron-sized material particles to construct micro structures.This paper reviewed the principles and advances of Laser-Guided Direct Writing technology,analysed the relevant phenomena of the process with experiments results,and discussed the possible application fields.
Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Dong Jiang Wu,Juan Zhuang,Xu Yue Wang,Ren Ke Kang,Fu Ling Zhao

DOI: https://doi.org/10.4028/www.scientific.net/KEM.329.415

2007-01-01

Key Engineering Materials

Abstract:We have developed the laser nanoprocessing technique by the integration of the fs laser and near-field scanning microscopy (NSOM). The second harmonic femtosecond laser working in the optical near-field with the assistance of NSOM equipment was applied to expose the photosensitive polymer material. The nanopatterns with feature size smaller than the laser wavelength can be fabricated. The optical diffraction limitation is therefore broken through by the near-field nanoprocessing. It was found in our experiment that the nanofabrication feature size depends strongly on the gap between the fiber probe tip and the substrate surface, as well as the laser coupling efficiency. The approach offers the advantages of high precision, speed and selectivity in nanopatterning, and is promising to be used in data storage device manufacture for higher density recording.
Nano-particles Fabrication on Ag Film by Femtosecond Laser Direct Ablation

Weiguo Yan,Chun-Li Luo,Guozhi Jia,Zu-Bin Li,Jianguo Tian

2012-01-01

Abstract:The unique electronic, optical, and catalytic properties of noble-metal nano-particles (NP) and nano-structures (NS) have attracted increasing interest in recent years. NP and NS can be fabricated by a large range of different techniques including directly laser ablation [1], laser induced forward transfer [2], laser induced backward transfer [3], laser-induced self-assembly [4] and chemical reduction. [5] Of these methods, directly laser ablation is a highly efficient method for fabricating NS and NP. Moreover, a femtosecond pulsed laser has a temporally short pulse that does not cause the significant heat conduction during ablating the metallic material. At the same time it can be controlled easily by changing the number of pulse and the energy of the laser beams to fabricate diverse dimensional nanostructures on various materials. In this paper we investigate the physical mechanisms behind the femtosecond pulse laser ablation on Ag thin film and take the laser ablating technology to produce metal NPs. NP size distribution was influenced by different laser pulse energy. The mechanism of the NP formation is discussed through TTM [6-8].
Additive and Subtractive 3D-Microfabrication of Micro/nanostructures

Yongfeng Lu,Wei Xiong,Li Jiang,Yun Shen Zhou,Yang Gao,Tommaso Baldacchini,Jean‐François Silvain,Lan Jiang

2015-01-01

Abstract:3D micro/nanofabrication techniques have recently attracted increased attention due to their promise in a wide range of applications including integrated optics, plasmonics, microbiology, and microelectromechanical systems (MEMS). Similar to 3D fabrication at macro scales, 3D micro/nanofabrication generally requires two fundamental approaches: additive and subtractive processes. Although both additive and subtractive micro/nanofabrication methods are established separately, they have been largely isolated and difficult to be integrated due to either material incompatibilities or significant differences in laser processing parameters. Fabricating advanced devices of complex 3D geometries calls for the use of both additive and subtractive processes. In this work, we successfully integrated an additive (TPP) and a subtractive (MPA) process into a single fs laser direct writing system (Photonic Professional, Nanoscribe GmbH) in which process conditions could be precisely controlled. The integrated fabrication method not only inherits the merits of both TPP and MPA such as writing resolution smaller than the diffraction limit and features with sharp and clean edges, but it also offers the possibility to produce novel device structures which are difficult to be fabricated by either TPP or MPA alone.
Special Issue on Laser Micro/Nano Machining Technology

Jianlei Cui

DOI: https://doi.org/10.3390/app122413013

2022-01-01

Applied Sciences

Abstract:Through the interaction between lasers and materials, laser micro/nano machining technology changes the materials’ physical state and properties [...]
Laser-Assisted Nanoprocessing and Growth of Semiconductor Nanostructures

David J. Hwang,Sang-Gil Ryu,Eunpa Kim,Jae-Hyuck Yoo,Bin Xiang,Oscar Dubon,Andrew M. Minor,Costas P. Grigoropoulos

DOI: https://doi.org/10.1117/12.882809

2011-01-01

Abstract:Recent research results are presented where lasers of different pulse durations and wavelengths have been coupled to near-field-scanning optical microscopes (NSOMs) through apertured bent cantilever fiber probes and atomic force microscope (AFM) tips in apertureless configurations. Experiments have been conducted on the surface modification of metals and semiconductor materials. By combining nanoscale ablative material removal with subsequent chemical etching steps, ablation nanolithography and patterning of fused silica and crystalline silicon wafers has been demonstrated. Confinement of laser-induced crystallization to nanometric scales has also been shown. In-situ observation of the nanoscale materials modification was conducted by coupling the NSOM tips with a scanning electron microscope (SEM). Nucleation and growth of semiconductor materials have been achieved by laser chemical vapor deposition (LCVD) at the nanoscale level. Locally selective growth of crystalline silicon nanowires with controlled size, heterogeneity and nanometric placement accuracy has been accomplished.
Fabrication of Nanostructures by Laser Optical Focusing

Bao Wang,Dong Feng,Jiadao Wang,Darong Chen

DOI: https://doi.org/10.12783/dtetr/apetc2017/11477

2017-01-01

DEStech Transactions on Engineering and Technology Research

Abstract:Surface structures have a broad application prospects, because the nanostructure or microstructure can improve the tribological properties. Laser processing has been widely used for microstructures due to the excellent controllability and universality and the precision of this method can be significantly increased by optical focusing. However, it is difficult to prepare nanometer scale material as focusing media. Here, a self-assembled monolayer of silica microspheres with diameter of about 900nm was formed on a bearing steel substrate and could be used as the focusing media. Large-area nanoholes were fabricated using overlapping pulses obtained through laser beam scanning. Scanning electron microscope (SEM) and profilometer characterized the shape and dimension of nanopatterns. Finally, the mechanisms of the formation of such structures depending on the number of laser pulses applied were discussed.
From nanocrystal synthesis to functional nanostructure fabrication: laser ablation in liquid.

P Liu,H Cui,C X Wang,G W Yang

DOI: https://doi.org/10.1039/b918759f

IF: 3.3

2010-01-01

Physical Chemistry Chemical Physics

Abstract:Although nanomaterials investigations have been carried over the recent decades, researchers still face a fundamental challenge: how to control the phase, size and shape of nanocrystals in the synthesis of nanomaterials, i.e., how to achieve the transformation from nanocrytsal synthesis to functional nanostructure fabrication. For this issue, we, in this review, introduce recent developments in laser ablation in liquid (LAL) for the synthesis and fabrication of novel nanostructures with metastable phases and shapes. Laser ablation of solid targets in liquid has actually opened a door toward to synthesize nanocrystals and fabricate nanostructures due to these advantages as follows: (i) LAL is a chemically "simple and clean" synthesis due to the process with reduced byproduct formation, simpler starting materials, no need for catalyst, etc. (ii) Under ambient conditions, not extreme temperature and pressure, a variety of metastable phases that may not usually be attainable, can be generated by mild preparation methods. (iii) New phase formation involves in both liquid and solid upon LAL, which allows researchers to choose and combine interesting solid target and liquid to synthesize nanocrystals and fabricate nanostructures of new compounds for purpose of fundamental research and potential applications. (iv) The phase, size and shape of the synthesized nanocrystals can be readily controlled by tuning laser parameters and applying assistances such as inorganic salts or electrical field upon LAL. For example, we have synthesized the micro- and nanocubes of carbon with C(8)-like structures by the inorganic salts assisted LAL, and the micro- and nanocubes and spindles of GeO(2) by the electrical field assisted LAL. Additionally, we have developed a new technique to fabricate functional nanopatterns on the basis of the pulsed-laser deposition in liquid. Accordingly, LAL could greatly extend its application in fabrication of functional nanostructures in the future.
Nano-Fabrication and Nano-Electron Devices

LIU Ming,XIE Chang-qing,WANG Cong-shun,LONG Shi-bing,LI Zhi-gang,YILI Cheng-rong,TU De-yu

DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.09.001

2005-01-01

Abstract:Some progress on top-down nano-fabrication, such as electron beam lithography,X-ray lithography and EUV lithography were introduced. The progress and challenge on quantum mechanism nano-devices such as SET, RTD and molecular device were also investigated.

Laser Technology of Composing Nano-materials

High Throughput Laser Nano Direct Writing Technique

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Applications of Laser Technology in Materials Science

Laser nano-technology of light materials: Precision and opportunity

The Fabrication of Micro/Nano Structures by Laser Machining

Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Laser-based Micro/nanofabrication in One, Two and Three Dimensions

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Laser-Guided Direct Writing Technology for Material Particles

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Nano-particles Fabrication on Ag Film by Femtosecond Laser Direct Ablation

Additive and Subtractive 3D-Microfabrication of Micro/nanostructures

Special Issue on Laser Micro/Nano Machining Technology

Laser-Assisted Nanoprocessing and Growth of Semiconductor Nanostructures

Fabrication of Nanostructures by Laser Optical Focusing

From nanocrystal synthesis to functional nanostructure fabrication: laser ablation in liquid.

Nano-Fabrication and Nano-Electron Devices