Abstract:The effectiveness of ultra-short pulsed laser radiation for high-precision material processing and surface micro-modification, owing to the minimal thermal and mechanical damage, has been shown. Micro/Nano structuring of thin films is gaining widespread importance owing to ever-increasing applications in a variety of fields. The present study details femtosecond laser interaction with ultra thin metallic films at the micro and nano scales. Results of Microablation studies, carried out with an 800nm wavelength, 80fs pulse duration, femtosecond laser focused tightly using a long working distance objective lens, are discussed. A parametric study of single shot ablation and subsequent atomic force microscope characterization of the ablation craters is presented. The formation of elevated convex hillock structures at low laser pulse energies and considerable delamination at higher energies evinces a stress driven modification mechanism. Further, nanostructuring results on thin films carried out with femtosecond laser in conjunction with an atomic force microscope are presented. Various nanofeatures were machined with high spatial resolution (∼10–12nm), flexibility and repeatability by utilizing the local field enhancement in the near-field of the scanning probe tip irradiated with the laser beam. Attempting to understand the modification mechanism and the physics involved, numerical simulation studies were performed to evaluate the field enhancement underneath the tip and the ‘femtosecond laser–thin film’ interaction dynamics in general. Possible applications of thin film structuring may be in the areas of high-resolution nanolithography, controlled nanodeposition, ultra high-density data storage, high-resolution mask production and repair, nanoelectronics, nanophotonics and various nanobiotechnology related applications.

Nano-particles Fabrication on Ag Film by Femtosecond Laser Direct Ablation

Large Area Uniform Nanostructures Fabricated by Direct Femtosecond Laser Ablation

Gold Nanoparticle Transfer Through Photothermal Effects in A Metamaterial Absorber by Nanosecond Laser

Femtosecond Pulse Laser Near-Field Ablation Of Ag Nanorods

High Resolution Selective Multilayer Laser Processing by Nanosecond Laser Ablation of Metal Nanoparticle Films

Atomic-level Ablation of Au@Ag NRs Using Ultrafast Laser Excitation

Controlled Joining of Ag Nanoparticles with Femtosecond Laser Radiation

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Fabrication of Micro- and Nanostructures in Thin Metallic Films by Femtosecond Laser Ablation

Controllable Formation of Nanogaps in Thin Metallic Film by Rear Side Irradiation with Ultrashort Pulsed Laser

Nanosecond Laser Ablation of Gold Nanoparticle Films

Size Control of Nanoparticles by Multiple-Pulse Laser Ablation

Surfactant Mediated Synthesis of Structured Metal Nanoparticle by Pulsed Laser Ablation for Photocatalysis

Mechanism of Nanostructure Processing on Au and Ag Nano-Film by a Nanosecond Laser Illuminating Cantilevered Scanning Near-Field Optical Microscopy Tip

Surface Nano-fabrication by Laser Precision Engineering

Nanostructuring of Semiconductor Materials and Metallic Thin Films Using Femtosecond Laser and Scanning Probe Microscope

Generation of oxide nanoparticles via femtosecond laser ablation

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Combined Experimental and Theoretical Study of Femtosecond Laser Based Micro/Nano Machining of Ultra Thin Metallic Films

In Situ Domain-Confined Epitaxial Regrowth of Individual Nanoparticle: Implications for Nanofabrication

Fabrication of Nanostructures by Laser Optical Focusing