Measurement of Thermal Deformation Influence on Machine Spindle Based on the Single-setup Tracking Interferometer

Jian JIANG,Ji-qing CHEN

DOI: https://doi.org/10.13462/j.cnki.mmtamt.2018.06.030

2018-01-01

Abstract:Based on the disadvantages of the traditional multi-pointed laser tracking interferometer measure-ment is time-consuming, and the influence of thermal deformation on the motion accuracy of machine tool spindle cannot be accurately detected. A single-pointed laser tracking interferometer measurement method is presented, the machine motion trajectory is gathered by a laser tracking interferometer only and the calibra-tion of motion trajectory is calculated by the axis coordinate. Compared with the traditional laser interferom-eter measurement, this method can not only calibrate the motion trajectory of the machine tool accurately, but also calculate the coordinates of the spindle target. The simulation results show that the movement preci-sion of the machine tool spindle can be accomplished by using the single-pointed laser tracking interferometer within 7 minute, the error of perpendicularity in Z direction has been increased and the maximum deviation in Y direction reach to 50 μm as a result of the thermal deformation, verifying the effectiveness of single station laser tracking interferometer measurement system.