Outlook of Technology in Humidity Sensor

Guo-hua HOU,Jing-zhi YIN,Wan-cheng LI,Fu-bin GAO,Yan MA,Xin-qi CHEN
DOI: https://doi.org/10.3969/j.issn.1002-1841.2016.04.001
2016-01-01
Abstract:With industrial development , humidity monitoring has been widely used in various fields such as instrumentation , automatic control systems , agriculture , climate and environment .Based on papers published in the past ten years , humidity sen-sors designed with the electrical , acoustic, and optical principles were introduced in this paper .The sensitivity, hysteresis,recov -ery and response time were compared for different humidity sensors made by ceramics , semiconductors , polymers, and nano-struc-tured materials.The performance specifications of market main stream humidity sensor were presented .Trends of humidity sensor’s application, material, and manufacture technology were described .
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