MEMS Microfabrication Technology Based on Rapid ProtoTyping

潘开林,陈子辰,付建中
DOI: https://doi.org/10.3321/j.issn:1004-132X.2002.20.004
2002-01-01
Abstract:Main microfabrication techniques for MicroElectroMechanical System (MEMS) are firstly commented on in this paper. The basic principle and framework of MEMS microfabrication system based on rapid prototyping are overviewed, and the microfabrication accuracy and examples are investigated. At last, a latest process called integral microstereolithography process in which a complete layer can be built using a single exposure is also reviewed with some examples.
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