The investigation of fabricated technique of NiC layer for unporlarized neutron supermirror

Xin JIN,Zhong ZHANG
DOI: https://doi.org/10.3969/j.issn.1005-5630.2017.04.014
2017-01-01
Abstract:NiC/Ti neutron supermirror as a kind of multilayered optical elements presents highperformance.The manufactured technique of NiC nano-meter films is extremely important to realize the fabrication of NiC/Ti multilayers.Based on the direct current magnetron sputtered technique of Ni and C,a co-sputtering technique is reported in this paper.The NiC monolayer was fabricated from NiC target successfully.The measured result of X-ray photoelectron spectroscopy (XPS) indicates that the atomic ratio of Ni and C from NiC layer made by NiC target agrees with the theoretical expected result.The Ni86C14 model based on the atomic ratio measured by XPS was used to fit the curve measured by grazing incidence X-ray reflectivity.The fitted curve is in generally consistent with the measured result.This investigation can give direction to develop the fabricated technique of NiC/Ti neutron supermirror.
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