Control Strategy of Silicon-based Integrated Planar MicroNano-positioning platform
WANG Jia-chou,LI Xin-xin,SUN Li-ning
DOI: https://doi.org/10.3969/j.issn.1002-1841.2009.z1.076
2009-01-01
Abstract:In order to realize nano-positioning platform miniaturiation,low power and high positioning accuracy,a silicon-based integrated planar micronano-positionig x-stage,based on the design thin king of the integration of structure,actuation and sensor-feedback was designed and fabricated for application in nanometer-scale operation and nanometric positioning precision.After the fabricated XY-stage mathematic model built,comprehensive open-loop and closed-loop controlcharacteristics were simulated and compared in full detail using analysis tools of Matlab software.Concernin the inaccurate model of the fabricated XY-stage due to micromachining fabrication imperfect,in practice,a single neuron adaptive PID controller,characterized by a simple structure, strong robustness and control parameters self-adjust varying with the external condition,was proposed and designed.The experimental results verifies that the controller is more suitable for the silicon-based integrated micro XY-stage,which can compensage for the inconsistence of the structural dimensions due to the limitation of the micromachining real-time,under which a±10μm single-axis displacement is measured,the settling time is less than 2.5 ms and the repeatability error is better than±24.9 nm.The presented control scheme is simple to implement in practical application