Phase scanning method for fabricating varied line-space gratings

时轮,胡德金,郝德阜
DOI: https://doi.org/10.3969/j.issn.1003-501X.2004.11.010
2004-01-01
Abstract:A phase scanning method for fabricating varied line-space (VLS) grating is put forward. The main devices of the method include a grating interferometer, which controls the ruling engine motion, and a phase scanning mechanism. If adjusting the grating interferometer to ensure that there are only two interference fringes in the detecting field and then changing the position of the photoelectric sensor, for counting the fringes, the grooves with varied line spaces can be ruled. An experimental VLS plane grating with 0.33 nm minimum space increments was ruled successfully according to the method described above. A space- measurement experiment by means of diffraction angle measurement is carried out. The fitting curves coming from VLS grating and from equivalent space grating indicate that the phase scanning method is valid in fabricating VLS grating with sub-nanometer space increments and it plays a reference role for super-precision positioning.
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