Soft X-ray Varied-Line-spacing Gratings Fabricated by Near-Field Holography Using an Electron Beam Lithography-Written Phase Mask
Dakui Lin,Zhengkun Liu,Kay Dietrich,Andrey Sokolov,Mewael Giday Sertsu,Hongjun Zhou,Tonglin Huo,Stefanie Kroker,Huoyao Chen,Keqiang Qiu,Xiangdong Xu,Franz Schaefers,Ying Liu,Ernst-Bernhard Kley,Yilin Hong
DOI: https://doi.org/10.1107/s1600577519008245
IF: 2.557
2019-01-01
Journal of Synchrotron Radiation
Abstract:A fabrication method comprising near-field holography (NFH) with an electron beam lithography (EBL)-written phase mask was developed to fabricate soft X-ray varied-line-spacing gratings (VLSGs). An EBL-written phase mask with an area of 52mm x 30mm and a central line density greater than 3000 linesmm(-1) was used. The introduction of the EBL-written phase mask substantially simplified the NFH optics for pattern transfer. The characterization of the groove density distribution and diffraction efficiency of the fabricated VLSGs indicates that the EBL-NFH method is feasible and promising for achieving high-accuracy groove density distributions with corresponding image properties. Vertical stray light is suppressed in the soft X-ray spectral range.