Abstract:A novel method called phase scanning is suggested in this paper, with which varied line-space diffraction grating can be fabricated on a classically photoelectric ruling engine. An experimentally blazed varied line-space plane grating with a central groove density of 1200 g/mm was fabricated. The space increment varies from -0.332nm to +0.332nm. A test to examine the scanning phase method was also made on it.

Phase Scanning in Ruling Engine for the Fabrication of Subnanometer Varied Line-Space Diffraction Gratings