Design for a Late Model Chip of Microfluidic Measuring

李义,郑小林,张文献
DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.02.003
2005-01-01
Abstract:LED antifuses and photodiode detector were integrated into a microfluidic chip that is realized with extended standard IC-compatible technology and micromachining technology. The chip comprises a microchannel sandwiched between a nanometre-scale diode antifuse light emitter and a photodiode detector. In this paper,the working principle and properties of antifuse,the chips structure and fabrication process,the possible applications and emulation are discussed. The chips potential applications comprise electro-osmotic flow speed measurement,detection of absorptivity of liquids in the channel,detection of changes of the refractive index of the medium in the channel,e.g. air bubbles,particles in the liquid.
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