Thermal Response of Multi-Layer Thin Metal Film Structure During Femtosecond Laser Heating Process

XU Hong-yu,WANG Qiu-jun,SONG Ya-qin,ZHANG Yuan-chong
DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.09.003
2005-01-01
Abstract:Using hyperbolic two-step heat conduction model, thermal response of multi-layer thin metal film is studied during short pulse laser heating process. Using consecutive conditions on interfaces, the expressions of electron gas and lattice temperature in Laplace transfonn domain are obtained for each layer of the three-layer thin metal film. Electron gas and lattice temperature profiles in each layer, 100 nm gold film and 34 nm gold film/33 nm Cr film/34 nm gold film, are obtained by numerical inverse. The numerical results show that the considerable nonequilibrium heat behavior arises both between the electron gas and the lattice, and at the interface between two metal materials during the heating process. The effects of material constants of the thin film on thermal response are discussed.
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