Micromechanical Tunable Optical Filter

Zhang Ruikang,Yang Xiaohong,Zhou Zhen,Xu Yingqiang,Zhang Wei,Du Yun,Huang Yongqing,REN Xiaomin,Niu Zhichuan,Wu Ronghan
DOI: https://doi.org/10.3969/j.issn.1674-4926.2003.04.003
2003-01-01
Chinese Journal of Semiconductors
Abstract:A micromachined vertical cavity tunable filter with AlGaAs/GaAs distributed Bragg reflector is presented.This filter can be electrostatic tuning over a range of 28nm with an applied voltage of 7V.
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