Design for manufacturability of sub-100 nanometer standard cells

Pei-yong ZHANG,Xiao-lang YAN,Zheng SHI,Gen-sheng GAO
DOI: https://doi.org/10.3969/j.issn.1007-0249.2006.05.011
2006-01-01
Abstract:New challenges emerge when standard cell design moves to VDSM and nanometer scale.With wide adoption of sub-wavelength lithography,printing fidelity decreases.And in such circumstances,DFM(Design For Manufacturability) of standard cells,which aims to improving manufacturability of ICs through specific design considerations,is becoming extremely important.In this paper,some typical patterns in cell design with DFM problems are analyzed;new design rules and solution styles are introduced;a set of DFM-compatible 90nm standard cells are designed.A new design and verification flow of standard cells,which includes lithographic simulation,specific testing circuitries and other technologies,is also presented.
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