Forward Model and Simulator of Thickness Measurement of Multi-Layered Conductive Structures by Eddy Current Technique

HUANG Ping-jie,ZHANG Guang-xin,WU Zhao-tong,ZHOU Ze-kui
DOI: https://doi.org/10.3969/j.issn.1004-1699.2005.03.040
2005-01-01
Abstract:The impedance change model of a probe coil above a structure with an arbitrary number of parallel layers is put forward.The solving method and calculation procedure of the forward model are investigated and then a simulator for the thickness measurement of multi-layered structures is established.The simulation results of thickness measurement of single layer,3 layers and 4 layers are calculated using the simulator and the trends of the impedance and thickness change curves are analyzed.The merits of the forward model and simulator are proofed by the experimental results.
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