Optimal Design of Precision Two-dimension Motion Stages for Repairing Large-aperture Optics

赵林杰,陈明君,王娜君,廖然,李省伟
DOI: https://doi.org/10.3969/j.issn.1003-5451.2016.04.003
2016-01-01
Abstract:Using the ANSYS , the ifnite element model is established to optimize the supporting board which is the weakness in the portal frame, and the precision demand of the two-dimension motion stages developed for repairing large-aperture optics are required. Model simulation is performed in order to study the effect of gas iflm stiffness on stages stiffness. The analysis results indicate that: the structure deformation is reduced to 14μm, the largest stress is far less than the yield stress and the ifrst order nature frequency is increased to 48.974 Hz, that means the stiffness of the device can be enhanced signiifcantly by optimizing the air bearing element structure and gas supply parameters.
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