Structural Optimization of the Cable-Pipe Assembly for a Lithography Stage Based on the Finite Element Method

CHENG Rong,WANG Xiyuan,ZHU Yu,YANG Kaiming
DOI: https://doi.org/10.16511/j.cnki.qhdxxb.2017.22.040
2017-01-01
Abstract:The stage is the key subsystem in a lithography machine. The cable-pipe assembly transmits the motor coil signal, power and coolant in stage systems. However, disturbances generated by the cable-pipe assembly reduce the ultra-precision of the stage. Therefore, the disturbances need to be reduced to improve the stage positioning accuracy. The cable-pipe assembly and its disturbance characteristics are analyzed to develop a simplified finite element model of the cable-pipe system. Then, the main structural parameters of the assembly are optimized with design guidelines for future cable-pipe assembly designs. Tests show that the finite element model is accurate with a first order frequency error of less than 10%. Simulations show that the disturbance amplitude of the L-direction is reduced by 80%relative to that without optimization.
What problem does this paper attempt to address?