Abstract:In the conventional femtosecond laser direct writing with a Gaussian beam, the focus is an ellipsoid with the long axis along the beam propagation direction, resulting in the ellipsoidal fabricated dot. Due to the simple shape of the dot, complex three-dimensional (3D) nano/microstructures should be written dot by dot by the focus scanning, which is usually timeconsuming. Therefore, a rapid nano/microfabrication technique is becoming highly desired to achieve arbitrary 3D nano/microstructures. By 2D phase modulation of the Gaussian beam, multi-focuses were generated for the direct writing of several same nano/microstructures simultaneously to save fabrication time, and donut and other 2D intensity distributions were produced for the single exposure fabrication of 2D microstructures. Here, we demonstrate the singleexposure two-photon polymerization of a 3D microstructure via the 3D focal field engineering by using the 2D phase-only spatial light modulation. With a single exposure, a whole 3D microstructure like a double-helix is polymerized simultaneously, whose configuration is controlled by the designed 3D focal intensity distribution. In addition, a longitudinal circular intensity distribution is generated for the multi-photon inscription of a depressed cladding waveguide inside glass with single scan transverse writing.

3D High Precision Laser Printing of a Flat Nanofocalizer for Subwavelength Light Spot Array

Subwavelength Focusing by a Micro/nanofiber Array.

3D nanoprinting for fiber-integrated achromatic diffractive lens

Subwavelength Focusing by a Microsphere Array

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Direct Laser Writing Breaking Diffraction Barrier Based on Two-Focus Parallel Peripheral-Photoinhibition Lithography

Direct Laser Writing of Pyramidal Plasmonic Structures with Apertures and Asymmetric Gratings Towards Efficient Subwavelength Light Focusing.

High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

Ultra-high Precision Laser Nanoprinting Based on Defect Compensated Digital Holography for Fast Fabricating Optical Metalenses

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Single-pulse Writing of a Concave Microlens Array.

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Femtosecond Laser Nano-Fabrication With Extended Processing Range

Flat Lens-Based Subwavelength Focusing and Scanning Enabled by Fourier Translation

Realization of Flexible and Parallel Laser Direct Writing by Multifocal Spot Modulation.

Design and Fabrication of Diffractive Microlens Arrays with Continuous Relief for Parallel Laser Direct Writing.

Parallel two-photon lithography achieving uniform sub-200 nm features with thousands of individually controlled foci

Optical Nanofabrication of Concave Microlens Arrays

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

High-resolution light field prints by nanoscale 3D printing

Nanopillar Array with a Λ/11 Diameter Fabricated by a Kind of Visible CW Laser Direct Lithography System