Application of Silicon Ring Resonators Towards Cryogenic Sensing

Minmin You,Jingquan Liu

DOI: https://doi.org/10.1364/cleo_at.2020.am1k.7

2020-01-01

Abstract:By utilizing a new method of package, a silicon ring resonator was successfully applied to cryogenic sensing. And it was experimentally demonstrated to have a linear sensitivity of 64.8 pm/K from 180 K to 300 K.

What problem does this paper attempt to address?

Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

Minmin You,Zude Lin,Xiuyan Li,Jingquan Liu

DOI: https://doi.org/10.1109/JLT.2020.3002552

IF: 4.7

2020-01-01

Journal of Lightwave Technology

Abstract:In this article, the temperature behavior of a silicon ring resonator is experimentally investigated for cryogenics. The ring resonator shows a linear sensitivity of 63.9 pm/K in the temperature range from 180 K to 300 K. And the experimental results agree well with the simulated data. The response time of the sensor is investigated by thermal analysis and a fast response of 325 ms is experimentally achieved. In addition, the developed sensor shows high performance in repeatability and stability. Based on our work, for the first time, silicon based ring resonators are applied to cryogenic temperature sensing with the prominent advantages of compactness, chip-scale integration and complementary metal oxide semiconductor (CMOS) compatibility. This work proves that silicon ring resonators are a potential platform for cryogenic monitoring.
Wide-range and Ultra-Low Temperature Thermometer Based on a Silicon Resonator.

Xiantao Zhu,Zude Lin,Xiuyan Li,Bin Yang,Jingquan Liu,Minmin You

DOI: https://doi.org/10.1364/ol.533213

IF: 3.6

2024-01-01

Optics Letters

Abstract:In this Letter, the silicon-based microring resonator (MRR) was experimentally demonstrated for cryogenic sensing down to 10 K by overcoming the issue of acquiring the optical signals at low temperatures for on-chip optical sensors. A wide-range temperature sensor from 240 to 10 K was obtained. The experimental results show that the device sensitivity decreased from 64.7 pm/K at 240 K to 4.19 pm/K at 10 K. Theoretical analysis indicates that the reduction in sensitivity is attributed to the weakening of thermo-optic effects with the decrease in temperature, which is well consistent with the experimental results. Based on this work, the silicon-based ring resonators, featuring complementary metal oxide semiconductor (CMOS) compatibility, high-quality factors, and ease of chip-scale integration, are a potential platform for ultra-low temperature monitoring.
Micro-ring Resonator Optical Sensor Based on Silicon and Silicon Nitride Waveguide

Jinsheng Ni,Mingyu Li,Jianjun He,Chang Su

DOI: https://doi.org/10.1117/12.2533464

2019-01-01

Abstract:In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.
Ultra-sensitive Silicon Photonic Current Sensor Using a Ring Resonator

Bing Wei,Changyun Zhao,Gencheng Wang,Tingge Dai,Yuehai Wang,Jianyi Yang,Yubo Li

DOI: https://doi.org/10.1088/2040-8978/18/8/085802

IF: 2.1

2016-01-01

Journal of Optics

Abstract:We proposed and experimentally investigated a compact and ultra-sensitive integrated photonic current sensor based on a silicon ring resonator in this paper. The current flowing through the integrated resistive TiN heater produces the Joule's heat and changes the temperature, which results in the change of refractive index and physical dimensions of the ring. An optical spectrum analyzer is used to monitor the resonant wavelength shift of the ring. The experiment results show that the sensor achieves an ultra-high sensitivity of 6.8. x. 10(4) nm A(-2) and good linearity between real-time current and wavelength shift in the test range of 0-10 mA.
Highly-Sensitive Silicon-On-Insulator Sensor Based on Two Cascaded Micro-Ring Resonators with Vernier Effect

Lei Jin,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1016/j.optcom.2010.08.035

IF: 2.4

2011-01-01

Optics Communications

Abstract:A highly-sensitive integrated optical biosensor based on two cascaded micro-rings resonator (MRR) is investigated theoretically and experimentally. The free spectral ranges (FSRs) of two cascaded micro-rings are designed to be slightly different in order to generate Vernier effect. A preliminary investigation of our sensor with a Q factor of 2×104 using different ethanol concentrations shows that the Vernier effect can improve the sensitivity to 1300nm per refractive index unit (RIU), compared to 62nm/RIU for a single ring sensor. The sensor also has a large measurement range of refractive index change up to 1.15×10−2 RIU. It can be useful for low-cost and highly-sensitive optical biosensor system.
Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Zhiping Yang,Yanlu Wang,Chang Su,Jian-Jun He,Mingyu Li

DOI: https://doi.org/10.1117/12.2573588

2020-01-01

Abstract:Although the cascaded double ring sensor can improve the sensitivity due to the difference between the radii of the reference ring and the sensing ring to produce Vernier effect, a large bandwidth spectrometer or a large tunable range laser is required for the wavelength interrogation. In this paper, the cascaded double ring senor based on silicon on insulator (SOI) with thermo-optical tuning for refractive index sensing is investigated. The peak wavelength shift of the transmission envelope can be converted into the electric power change of the micro-heater. The sensitivity reaches 33.703×103 mW/RIU by fitting Gaussian function to the spectral envelope for the wavelength interrogation with 7.9 nm wavelength measurement range.
Sensitive Birefringent Temperature Sensor Based on a Waveguide Ring Resonator.

Xuhui Yu,Huilian Ma,Zhonghe Jin,Ming Pan,Liwei Hou,Wei Xie

DOI: https://doi.org/10.1364/ao.53.002748

IF: 1.9

2014-01-01

Applied Optics

Abstract:A sensitive birefringent thermometer based on a SiO2 waveguide ring resonator is demonstrated in this paper. It can be used to fabricate a terahertz thermal detector. The temperature sensitivity is enhanced by the resonances of two polarization modes in the waveguide ring resonator. A high degree of common rejection exists for external influence. A linear temperature range from 6°C to 40°C has been detected with resolution of 0.025°C.
Self-Referenced Temperature Sensors Based on Cascaded Silicon Ring Resonator

Bin Yang,Jingquan Liu,Minmin You,Zude Lin,Xiantao Zhu

DOI: https://doi.org/10.1109/MEMS49605.2023.10052234

2023-01-15

Abstract:This paper proposed a novel self-referenced thermometer based on a silicon cascaded micro-ring resonator (CMRR). A tapered waveguide cascades the reference ring covered by the titanium dioxide (TiO2) cladding with the sensing ring. Taking advantage of dual resonances derived from the two different waveguides, the simulation result shows the sensitivity of the CMRR is 63.4 pm/K utilizing the differential wavelength shifts (Δλ=λsensing-λreference) method. Moreover, the reference ring is temperature insensitive due to the thermo-optic effect of the silicon waveguide being offset out by the cladding with a negative thermo-optic coefficient (TOC). The work shows a new avenue for high-sensitivity and high-stability temperature sensing based on the silicon ring resonator.

Materials Science,Physics,Engineering
A Resonant Low-Pressure Microsensor With Low Temperature Disturbance

Yu Zheng,Sen Zhang,Deyong Chen,Junbo Wang,Jian Chen

DOI: https://doi.org/10.1109/jsen.2022.3164801

IF: 4.3

2022-01-01

IEEE Sensors Journal

Abstract:This article introduces a resonant low-pressure microsensor comprising a silicon-on-insulator wafer (SOI) for low-pressure sensing, and a glass-on-silicon wafer (GOS) for vacuum package. In GOS wafer, the inclusion of silicon layer can dramatically decrease thermal mismatch between device layer in SOI and glass layer in GOS, effectively reducing temperature disturbance of the resonant low-pressure microsensor from 107 Hz/°C (with glass wafer packaging) to 26 Hz/°C (with GOS wafer packaging) based on FEA simulations. Experimental results demonstrated that the low-pressure sensitivities and temperature disturbances for the fabricated microsensors were measured as ±4 Hz/Pa and 35 Hz/°C separately. Based on pressure and temperature calibrations, higher accuracies indicated by fitting errors inside ±1.8 Pa, measurement errors inside ±4 Pa and hysteresis inside 1.6 Pa, were realized by the resonant low-pressure microsensor in the pressure and temperature ranges of 0.1-1 kPa and −40 – 80 °C, demonstrating higher performances than previous studies with wider temperature range.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Minmin You,Zhu Xiantao,Jingquan Liu

2023-01-01

Abstract:We investigated the temperature dependence of silicon ring resonators deposited TiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> cladding. It was experimentally demonstrated that temperature sensitivity can be greatly modulated from 7.68 pm/K to 51.95 pm/K by varying width of waveguide from 330 nm to 390 nm.
Thin Film Resistance Thermometer with Simple Package for Cryogenic Application

Yun Li,Fangfang Wang,Minmin You,Zude Lin,Jingquan Liu

DOI: https://doi.org/10.1016/j.cryogenics.2019.102997

IF: 2.134

2019-01-01

Cryogenics

Abstract:In this paper, we proposed a novel simple package based on micro-machining for thin-film cryogenic temperature sensors. The substrate with temperature sensitive element fabricated by micro-machining process, directly used as the package substrate. Then, the silicon cover soldered on the substrate, providing vacuum encapsulation with high air tightness. Subsequently, we researched the reliability of the package by leak rate detection, shear force test and scanning electron microscope. Lastly, the temperature response curves, measurement fluctuation, thermal response time and short-term stability of the thermometers had been researched. Compared to the traditional package, the simple package simplified manufacturing process, reduced cost. Furthermore, the temperature sensitive element directly deposited on the package substrate, reduced sensor mass and improved thermal response speed.
A Wireless Passive Vibration Sensing Method for Cryogenic Applications

Ziqi Zhao,Jarred Fastier-Wooller,Michitaka Yamamoto,Seiichi Takamatsu,Toshihiro Itoh

DOI: https://doi.org/10.1063/5.0173778

IF: 4

2023-01-01

Applied Physics Letters

Abstract:In this Letter, we developed a wireless passive vibration sensing method functional at cryogenic temperatures (-196 degrees C). Traditional vibration sensors are either inconvenient or complicated in cryogenic environments due to inaccessible working positions and weak low-temperature tolerances. We propose a vibration measurement method that transfers a mechanical vibration to a wirelessly obtained return loss. Passive wireless monitoring is performed using a backscattering tag antenna integrated with a tunnel magnetoresistor. We fabricate and evaluate our vibration sensor at room temperature (24 degrees C) and cryogenic temperature (-196 degrees C) to verify the proposed design. Experimental analysis identified different vibration amplitudes with sensitivities of 4.61 dB/mm at 24 degrees C and 1.13 dB/mm at -196 degrees C. Further analysis shows that the vibrational frequency can be extrapolated. Our sensor provides a low-cost, robust, wireless, and passive vibration measurement method that is desirable in cryogenic applications.
Porous Silicon-Based Microring Resonator for Temperature and Cancer Cell Detection

Rahul Kumar Gangwar,Jun Qin,Xingjun Wang

DOI: https://doi.org/10.3389/fphy.2022.929033

IF: 3.718

2022-01-01

Frontiers in Physics

Abstract:In this article, a microring resonator sensor based on porous silicon is proposed for temperature and cancer cell detection, simultaneously. The porous behavior of silicon with a large internal surface area allows external materials to interact directly with the guided modes. The resonance wavelength in the transmission spectrum of the microring resonator is very sensitive to external environmental properties such as refractive index and temperature. The transmission characteristics of the proposed sensor were numerically determined by full vectorial finite element analysis. The achieved maximum sensitivity of the proposed sensor with optimized parameters was 150 pm/degrees C for an operational temperature range of 20-100 degrees C and 284.0306 nm/RIU for operational cancer cell detection, respectively. The results presented here suggest the microring resonator sensor can be used in the fields of environment sensing, temperature sensing, chemical sensing, and biosensing.
Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology

Kanglai Zhu,Minmin You,Yongpeng Ran,Yudong Shen,Bin Yang,Jingquan Liu

DOI: https://doi.org/10.1109/mems58180.2024.10439551

2024-01-01

Abstract:This paper reports a miniaturized temperature sensor based on ruthenium oxide with low resistance and high sensitivity at cryogenics. The ruthenium oxide thin films were prepared by screen-printing while electrodes were prepared using sputtering and lift-off processes. The size of the bare die is 1.0 mm x 0.8 mm and the packaged device size is 3.0 mm x 2.0 mm utilizing vacuum ceramic packaging technology. Compared with other cryogenic thermometers, this sensor performs a low resistance of 6400 Omega even when the temperature is down to 2 K. While, the temperature sensitivity and temperature coefficient of resistance (TCR) can achieve very high value of -870 Omega/K and -13.5% respectively.
Fast Thermodynamic Study on a Silicon Nanotransistor at Cryogenic Temperatures

Yangbo Zhang,Hao Guan,Tingfeng Sheng,Ruiwen Chen,Sven Rogge,Jiangfeng Du,Chunming Yin

DOI: https://doi.org/10.1021/acs.nanolett.4c01424

2024-07-24

Abstract:Cryogenic temperatures are crucial for the operation of semiconductor quantum electronic devices, yet the heating effects induced by microwave or laser signals used for quantum state manipulation can lead to significant temperature variations at the nanoscale. Therefore, probing the temperature of individual devices in working conditions and understanding the thermodynamics are paramount for designing and operating large-scale quantum computing systems. In this study, we demonstrate high-sensitivity fast thermometry in a silicon nanotransistor at cryogenic temperatures using RF reflectometry. Through this method, we explore the thermodynamic processes of the nanotransistor during and after a laser pulse and determine the dominant heat dissipation channels in the few-kelvin temperature range. These insights are important to understand thermal budgets in quantum circuits, with our techniques being compatible with microwave and laser radiation, offering a versatile approach for studying other quantum electronic devices in working conditions.
Microfabrication of Thin Film Temperature Sensor for Cryogenic Measurement

Shui-Dong Jiang,Jing-Quan Liu,Bin Yang,Hong-Ying Zhu,Chun-Sheng Yang

DOI: https://doi.org/10.1007/s00542-013-1982-x

2013-01-01

Microsystem Technologies

Abstract:In this paper, thin film Pt temperature microsensor in the temperature range of 10–100 K for cryogenic engineering applications is proposed and researched. The sensor is designed with two structures, and they are obtained by micro fabrication technology. The sensors are annealed in different conditions. The degree crystallization and grain size are analyzed by X-ray diffraction and SEM for both as-deposited and annealed sensors. The resistance dependency on temperature test result shows that when temperature is larger and smaller than 50 K, the average temperature coefficient resistance (TCR) of rectangular shape sensor could achieve 3,118 ppm/K and above 257 ppm/K, respectively. Meanwhile, TCR of circular shape sensor is 2,778 ppm/K and above 249 ppm/K, respectively. The good thermal cycle stability is observed. After three cycles between 10 and 100 K, the maximum resistance variation values are 0.0034 and 0.0137 %, which correspond to 0.0082 and 0.061 K temperature shift for the rectangular and circular sensors, respectively. The ΔT/T (%) of rectangular and circular sensors is performed with the magnetic field up to 6T in the temperature range of 10–100 K, and they are within the range of −19.84 to 0.137 and −2.18 to 11.33 for rectangular and circular sensors,respectively. The impedance test shows that the sensors have the same electric properties under direct current and alternating current condition.
Dual Silicon Microring Resonators for Carbon Dioxide Gas Sensing

Hui Zhang,Jiaqi Wang,Penghao Ding,Zihao Ou,Yingqi Xu,Guoxian Wu,Zhijian Mao,Xu Li,Yu Du,Youfu Geng,Xuejin Li,Zhenzhou Cheng

DOI: https://doi.org/10.1109/icocn63276.2024.10648320

2024-01-01

Abstract:We proposed dual microring resonators with SiO2 and polyhexamethylene biguanide hydrochloride claddings for CO2 sensing with temperature compensation, achieving a simulated sensitivity of 3.6 pm/ppm. Then we fabricated dual microrings and conducted temperature-response measurements.
Strong electron–phonon coupling of Cr 3+ ion provides an opportunity for superior sensitivity cryogenic sensing

Shuangqiang Fang,Ying Li,Peiqing Cai,Qiangqiang Zhu,Yue Zhai,Hong Zhang,Mingsheng Cai,Tianchun Lang,Le Wang

DOI: https://doi.org/10.1016/j.optlastec.2022.108844

2022-10-31

Abstract:Nowadays, optical temperature measurement is becoming a reliable and advanced technology. Most of optical temperature sensing materials have been reported in the first biological temperature region or even higher. However, cryogenic optical sensing materials seem to be ignored. Here, Cr 3+ -doped SrGa 12 O 19 is reported, exhibiting a obvious sharp peak at 696 nm ( 2 E→ 4 A 2 ) and near-infrared emission at 750 nm ( 4 T 2 → 4 A 2 ) at 77 K. As the temperature increases, the transition of 2 E→ 4 A 2 is suppressed and the emission of 4 T 2 is broadened due to the increasing electron–phonon coupling effect. This feature provides an opportunity to obtain the obvious discrepancy of fluorescence intensity, and further realize the superior cryogenic sensing performance based fluorescence intensity ratio (FIR) method with the maximum absolute sensitivity (S a ) of 0.0085 K −1 and relative sensitivity (S r ) of 2.62 %·K −1 at 77 K. The value of S r is 138.6 % higher than that of CaHfO 3 :Cr 3+ system and the temperature uncertainty (δT) is one order of magnitude lower than the most popular ruby Al 2 O 3 :Cr 3+ , showing superior cryogenic sensing ability. This work not only exhibits a novel cryogenic sensing material but also provides a train of thought for designing cryogenic thermometer.

optics,physics, applied
Research on High-Precision Silicon-Based Integrated Optical Temperature Sensor

Yimeng Wang,Xingjun Wang,Xiuyou Han

DOI: https://doi.org/10.1117/12.2606526

2021-01-01

Abstract:Integrated optical temperature sensor nowadays has attracted extensive interests thanks to its merits of high accuracy, electromagnetic immunity, and compact size compared with the traditional solutions. So far, most of the state-of-art integrated optical temperature sensors work by spectrum detection of a resonant cavity, which has certain limitations in terms of response time and cost, and it is difficult to achieve high level integration of the overall system. To solve the above problems, in this paper we use silicon-based integrated micro-ring array technology for high-precision real-time temperature sensing. By constructing a monotonic relationship between the output light intensity of the micro-ring array with the variation of the temperature, rapid and high-precision temperature measurement could be realized. Depending on different practical scenarios, the system can be customized to adapt specific temperature measurement range and resolution. Through the optimized design, the system accuracy could be better than 60mK covering temperature range of 297K~415K, with response time better than 20μs.
A high frequency SiC nanobeam resonator with ultra-sensitivity

Pengfei Xu,Dazhi Wang,Yichang Cui,Yu Zhang,Jianqiao He,Liangkun Lu,Yikang Li,Xiangji Chen,Chang Liu,Peiran Li,Yan Cui,Liujia Suo

DOI: https://doi.org/10.1016/j.matdes.2023.112226

IF: 9.417

2023-09-01

Materials & Design

Abstract:Nanomechanical resonator based on nanomaterials has great potential for high sensitive, high resolution and negligible energy consumed sensing devices. In this work, high frequency SiC nanobeam resonators with a diameter of ∼100 nm and with lengths of tens of micrometers were designed and demonstrated, which was produced based on the high quality monocrystal 3C-SiC nanowire material with high aspect ratio characteristics. The resonance behaviors of the nanobeam resonator was studied using an integrated mixing circuit measurement system with the pressure from 10−3 to 10−1 Torr. It was observed that the resonant frequency was up to 9.16 MHz, which was a distinguished essential feature for high sensitivity detection. The tunability of SiC nanobeam resonators was about 22%, which can be conveniently controlled by adjusting DC voltage on the gate. It was examined that the detection value of the SiC nanobeam resonator can be as low as zeptogram, which indicated its ultra-sensitive mass detection behaviors. The results show that the SiC nanobeam resonator has high resonant frequency, large tunability and high sensitivity, which is expected to be a high-performance device for biosensing and mechanical sensing.

materials science, multidisciplinary

Application of Silicon Ring Resonators Towards Cryogenic Sensing

Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

Wide-range and Ultra-Low Temperature Thermometer Based on a Silicon Resonator.

Micro-ring Resonator Optical Sensor Based on Silicon and Silicon Nitride Waveguide

Ultra-sensitive Silicon Photonic Current Sensor Using a Ring Resonator

Highly-Sensitive Silicon-On-Insulator Sensor Based on Two Cascaded Micro-Ring Resonators with Vernier Effect

Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Sensitive Birefringent Temperature Sensor Based on a Waveguide Ring Resonator.

Self-Referenced Temperature Sensors Based on Cascaded Silicon Ring Resonator

A Resonant Low-Pressure Microsensor With Low Temperature Disturbance

Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Thin Film Resistance Thermometer with Simple Package for Cryogenic Application

A Wireless Passive Vibration Sensing Method for Cryogenic Applications

Porous Silicon-Based Microring Resonator for Temperature and Cancer Cell Detection

Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology

Fast Thermodynamic Study on a Silicon Nanotransistor at Cryogenic Temperatures

Microfabrication of Thin Film Temperature Sensor for Cryogenic Measurement

Dual Silicon Microring Resonators for Carbon Dioxide Gas Sensing

Strong electron–phonon coupling of Cr 3+ ion provides an opportunity for superior sensitivity cryogenic sensing

Research on High-Precision Silicon-Based Integrated Optical Temperature Sensor

A high frequency SiC nanobeam resonator with ultra-sensitivity