Hydrogen-modulated Ar/CH4 HWP-CVD for Fast Preparation of Multi-Wall Carbon Nanotube Arrays with High Specific Capacitance

Peiyu Ji,Jiali Chen,Tianyuan Huang,Lanjian Zhuge,Xuemei Wu
DOI: https://doi.org/10.1016/j.diamond.2020.108067
IF: 3.806
2020-01-01
Diamond and Related Materials
Abstract:Two-dimensional Multiwalled Carbon Nanotube arrays (MWCNTs) were prepared by a novel high-density helicon wave plasma chemical vapor deposition (HWP-CVD) at room temperature. Preliminary studies show that the MWCNTs prepared by this method has strong orientation and is perpendicular to the substrate surface, and exhibit a highly ordered array distribution. The addition of hydrogen can effectively improve the growth rate of MWCNTs and increase the aspect ratio. The height and aspect ratio of MWCNTs can be effectively increased with the increase of growth time. Electrochemical investigation indicated that MWCNTs have high specific capacitance (1.96 mF/cm−2) and excellent rate capability (81.6%).
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