In Situ Synthesis of a Highly Cross-Linked Polymethacrylimide Ultrathin Film on a Silicon Wafer with Applicable Dielectric, Thermal, and Mechanical Properties

Yang Liu,Yutong Han,Lishuang Xiong,Tao Hang,Huiqin Ling,Anmin Hu,Liming Gao,Yunwen Wu,Ming Li
DOI: https://doi.org/10.1016/j.tsf.2020.138308
IF: 2.1
2020-01-01
Thin Solid Films
Abstract:•Ultra-thin polymethacrylimide film is in-situ prepared on the silicon surface.•The polymethacrylimide film is composed of cyclic and cross-linked imide structures.•The polymethacrylimide film shows low surface roughness and good dielectric properties.
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