Surface Engineering of Si Wafers with Tunable Surface Morphology and Stiffness Via Visible Light Induced T Hiol‐ene Click Polymerization with 4‐( N , N ‐diphenylamino)benzaldehyde As an Organocatalyst

Yiran Wang,Qingyu Liao,Yuqing Fan,Dong Chen,Yuhong Ma,Changwen Zhao,Wantai Yang
DOI: https://doi.org/10.1002/app.52677
IF: 3
2022-01-01
Journal of Applied Polymer Science
Abstract:A facile strategy is developed to fabricate a two-layer grafted polymer coatings on silicon wafers, specifically soft crosslinked polythioether as middle damping layer and stiff poly(methyl methacrylate) (PMMA) as top protecting layer. At first, a highly crosslinked polythioether layer was constructed on the surface of the silicon wafer with tunable thickness and smooth morphology with trimethylolpropane tris(2-mercaptoacetate) and pentaerythritol triallyl ether as monomers and 4-(N,N-diphenyl-amino)benzaldehyde as an organocatalyst. The Young's modulus of the grafted crosslinked polythioether layer is about 300-400 MPa and the roughness is about 11.3 nm measured by atomic force microscope. There are about 9000 ea reactive -SH in a cuboid cell with 1 nm(2) base area and 7-14 mu m height in the grafted crosslinked polythiolether layer. Then, a flatten PMMA coating layer with Young's modulus as high as similar to 2.4 GPa was grafted from/onto the surface of the crosslinked polythiolether with surface -SH groups as initiating or chain transfer sites.
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