Growth Mechanism Of Interfacial Imcs On (111) Preferred Orientation Nanotwinned Cu Ubm For 3d Ic Packaging

M.L. Huang,Y. Wu
DOI: https://doi.org/10.1109/ECTC32862.2020.00294
2020-01-01
Abstract:The interfacial reaction in the solder interconnects with (111)-oriented nt-Cu as UBMs during the liquid-solid soldering was investigated, and the grain orientation evolution of interfacial intermetallic compounds (IMCs) during the interfacial reaction was also characterized. Due to the specific crystal orientation and high-density twins structure of (111)-oriented nt-Cu UBM, in the as-soldered state, the thickness and orientation of interfacial Cu6Sn5 grains were remarkably affected by the (111)-oriented nt-Cu substrate. The interfacial Cu6Sn5 formed on (111)-oriented nt-Cu substrate is significantly thinner than that on common polycrystalline Cu substrate; the orientation of interfacial Cu6Sn5 grains formed on (111)-oriented nt-Cu substrate exhibits <11-20> texture while randomly distributed on common polycrystalline Cu substrate. With increasing reaction time, the (111)-oriented nt-Cu substrate significantly reduce the growth kinetics of interfacial IMCs (Cu6Sn5 and Cu3Sn) compared with the common polycrystalline Cu. The <11-20> preferred orientation Cu6Sn5 grains initially formed on (111)-oriented nt-Cu substrate gradually transformed into random distribution with prolonged reaction time. This study will provide a better understanding on the interfacial reaction and the orientation evolution of interfacial IMCs with (111)-oriented nt-Cu as UBMs in 3D packaging technology.
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