Abstract:Summary form only given. Experiments on individual nanoparticles are generally difficult but can be carried out by the techniques of modern in-situ electron microscopy. With the continuous improvement of in situ techniques inside transmission electron microscope (TEM), the capabilities of TEM extend beyond structural characterization to high-precision nanofabrication and property measurement, which not only enriches the experimental methods of nanoresearch, but also provides new opportunities for the development in nanoscience and nanotechnology. Based on the idea of “setting up a nanolab inside a TEM”, we review our recent progress in atomic resolution nanofabrication and dynamic characterization of structure and properties of nanomaterials. The electron beam can be used as a tool to induce nanofabrication on an atomic scale. Selective irradiation of MWNTs with a focused electron beam can induce changes of their shape such as cutting, bending, welding and drilling a hole on them. In addition, metal crystals can be encapsulated inside graphitic nanocontainers that were designed for in-situ electron irradiation experiments. Under irradiation, the carbon shells contract and lead to compressive forces. By measuring the lattice spacings in HRTEM images of metal crystals inside graphitic shells, pressures on the order 10-20 GPa were determined. Non-hydrostatic pressure, e.g., inside collapsing nanotubes, may deform the crystals considerably. This can be used for studying the deformation behaviour of individual nanometer-sized crystals. Fig. 1 shows how a Co wire inside a carbon nanotube is deformed and extruded when the the nanotube collapses locally under electron irradiation. Another deformation cell, allowing the detailed study of crystal deformation, was designed by electron-beam structuring, as shown in Fig. 2. A 'carbon onion', encapsulating a Au crystal, was punctured by a fully focused electron beam and subsequently exposed to uniform irradiati- n so that the Au crystal was slowly extruded through the hole. The interaction between metal and carbon was also studied on an atomic scale by introducing Au and Pt atoms into graphene layers. Individual Au or Pt atoms were observed by HRTEM at different temperatures and their migration was monitored. Fig. 3 shows drilling a Snm-diameter hole by electron beam on graphene for third-generation gene sequencing. The mechanism of electron-beam induced high-resolution nanofabrication was also discussed.

Atomic Modulation Engineering of Hexagon-Shaped CeO2 Nanocrystals by In Situ Sculpturing of an Electron Beam

Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures Via in Situ Electron Irradiation

Nanojoint Formation Between Ceramic Titanate Nanowires and Spot Melting of Metal Nanowires with Electron Beam

Electron Beam Etching of CaO Crystals Observed Atom by Atom.

Fabrication Of Ultrafine Nanostructures With Single-Nanometre Precision In A High-Resolution Transmission Electron Microscope

Atomic resolution nanofabrication and dynamic characterization.

When the atoms dance: exploring mechanisms of electron-beam induced modifications of materials with machine-learning assisted high temporal resolution electron microscopy

Atomic Fabrication of 2D Materials Using Electron Beams Inside an Electron Microscope

Anomalous Shape Evolution of Ag2O2 Nanocrystals Modulated by Surface Adsorbates During Electron Beam Etching.

In situ investigation of aluminum oxide under irradiation by electron beam at atomic-scale

Arbitrary Structures Fabricated by Focused Ion Beam Milling

Patterning: Atomic‐Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision (small 44/2015)

Exploring electron-beam induced modifications of materials with machine-learning assisted high temporal resolution electron microscopy

Direct Observation of Pt Nanocrystal Coalescence Induced by Electron-Excitation-enhanced Van Der Waals Interactions

Nanoscale Material Design and Processing by Electron Beam Energy

Precisely Monitoring and Tailoring 2D Nanostructures at the Atomic Scale

Atomic‐Precision Manipulation of Defects in RuO2 Nanocrystals via Electron‐Beam

Surface Atomic Structure and Growth Mechanism of Monodisperse {1 0 0}-Faceted Strontium Titanate Zirconate Nanocubes

E-beam-induced in Situ Structural Transformation in One-Dimensional Nanomaterials

Electrically driven cation exchange for in situ fabrication of individual nanostructures

Fabrication of Nanoarms and Nanotips Via Focused Ion Beam Milling