Tribological and Mechanical Properties of Hardness-Modulated TiAlSiN Multilayer Coatings Fabricated by Plasma Immersion Ion Implantation and Deposition

Fan Zhao,Yuqiang Ge,Langping Wang,Xiaofeng Wang
DOI: https://doi.org/10.1016/j.surfcoat.2020.126475
2020-01-01
Abstract:TiAlSiN monolayer coatings with different hardness and hardness-modulated TiAlSiN multilayer coatings with varied modulation periods were obtained on WC-Co substrates by plasma immersion ion implantation and deposition using TiAlSi cathodes. (Ti, Al)N (111), (200), (220), (311) and (222) diffraction peaks could be found in X-ray diffraction (XRD) patterns of the as-deposited coatings and a preferred orientation (Ti, Al)N (200) peak was obvious for all samples. Energy dispersive X-ray spectrometry (EDS) results showed that the TiAlSiN monolayer coating prepared at a high N-2 pressure obtained a large Si content. The nano-indentation tests revealed that the hardness of the TiAlSiN monolayer coating could be varied from 33.71 to 41.43 GPa when the N-2 pressure during the deposition process was changed from 0.08 to 0.2 Pa, which proved that hardness-modulated TiAlSiN multilayers could be obtained by varying the working pressure. Meanwhile, the hardness (32.25-37.56 GPa) of the modulated multilayers lied between those of the TiAlSiN monolayers. Scratch tests exhibited that the TiAlSiN monolayer coating prepared at 0.2 Pa N-2 pressure peeled obviously at the L-C1 value of 20.8 N, while that of the multilayer coating occurred at 144.4 N. Tribological tests showed that the wear rate of the hardness-modulated TiAlSiN multilayer coating could be reduced to 1/8 of that of the monolayer coating.
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