Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Laser direct-writing to enable filtration in paper-based devices

High Throughput Laser Nano Direct Writing Technique

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation

Laser Direct Writing Using Submicron-Diameter Fibers.

Laser-etched grooves for rapid fluid delivery for a paper-based chemiresistive biosensor

Femtosecond laser ablation of nitrocellulose for spatio-temporal flow control in μPADs

Direct Laser Writing Breaking Diffraction Barrier Based on Two-Focus Parallel Peripheral-Photoinhibition Lithography

DIRECT AND ALL-DRY FABRICATION OF PAPER-BASED MICROFLUIDIC DEVICE USING PARYLENE-C DEPOSITION AND MASKLESS MICROPLASMA WRITING

Development of Paper Microfluidics with 3D-Printed PDMS Barriers for Flow Control

From Microfluidic Paper-Based Analytical Devices to Paper-Based Biofluidics with Integrated Continuous Perfusion.

Laser Carved Micro-Crack Channels in Paper-Based Dilution Devices

Direct laser writing of hydrophobic and hydrophilic valves in the same material applied to centrifugal microfluidics

Direct laser writing-enabled 3D printing strategies for microfluidic applications

High throughput clogging free microfluidic particle filter by femtosecond laser micromachining

Microfluidic Channels Fabrication Based on Underwater Superpolymphobic Microgrooves Produced by Femtosecond Laser Direct Writing

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration.

Fabrication of Poly(dimethylsiloxane) Microfluidic System Based on Masters Directly Printed with an Office Laser Printer.

Accumulating Microparticles and Direct-Writing Micropatterns Using a Continuous-Wave Laser-Induced Vapor Bubble.

Laser-ablated acoustofluidics-driven paper devices for controllable chemical engineering in color display applications

Femtosecond laser writing of durable open microfluidic channels via a mode-switchable strategy