Influence of TiO 2 Seeding Layers on Phase Composition of Lead Magnesium Niobate-Lead Titanate Thin Films Prepared by RF Magnetron Sputtering

Wang Junming,Li Weili,Fei Weidong
2007-01-01
Abstract:The influence of amorphous TiO 2 seeding layers on the phase composition of lead magnesium niobate-lead titanate(0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3,PMN-PT) films deposited on Pt/Ti/SiO2/Si substrate by RF magnetron sputtering was examined.The relation between seeding layer thickness and phase composition at different post annealing temperature was observed by XRD.The thickness of amorphous TiO 2 seeding layer and post annealing temperature had remarkable effects on PMN-PT film phase composition.When amorphous seeding layer becomes thick,a new phase of Nb2O5 exists in the films.Only when the seeding layer thickness is suitable,the film with pure perovskite phase can be attained.
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