Abstract:The high surface-to-volume ratio of nanostructured materials is the key factor for excellent performance when applied to chemical sensors. In order to achieve this by a facile and low-cost fabrication strategy, buffered oxide etchant (BOE) treatment of a silicon (Si)-based sensor was proposed. An n+–n––n+ Si nanofilm structure was treated with a BOE, and palladium nanoparticles (PdNPs) were coated on the n-type Si channel surface via short-time electron beam evaporation to enable a highly sensitive and selective sensing of hydrogen (H2) gas. The BOE treatment effect on lightly doped n-type Si was investigated, and the surface morphology of the etched Si was analyzed. Furthermore, the H2 sensing characterization of PdNP-decorated Si devices with various BOE treatment times was systematically evaluated at room temperature. The results revealed that the surface of n-type Si is roughened by BOE treatment, which can further enhance the H2-sensing performance of Pd-decorated Si. The elaborate study on the BOE-post-treated Si H2 sensor showed that the performance enhancement was stable. The BOE treatment strategy was also applied to the nanopatterned Si sensors, which induced a clear performance enhancement for the H2 sensing.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c08977?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c08977</a>.Optical images and SEM images of the BOE-etched Si surface; I–V curve of the devices with different BOE etching times; schematic illustration of H2 gas sensing mechanism for Pd-decorated Si-sensing devices; schematic illustration of BOE treatment for a Si nanofilm device with and without Pd decoration; lower H2 concentration sensing performance; fabrication process for the Si nanomesh structure by nanosphere lithography; and gas sensing test setups (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c08977/suppl_file/am0c08977_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

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