A Hydrogen Sensor Based on Mg–Pd Alloy Thin Film

K. Yoshimura,S. Nakano,S. Uchinashi,S. Yamaura,H. Kimura,A. Inoue
DOI: https://doi.org/10.1088/0957-0233/18/11/011
IF: 2.398
2007-01-01
Measurement Science and Technology
Abstract:We report on the hydrogen sensing property of Pd-capped Mg-Pd alloy thin films which were prepared by dc magnetron sputtering. Pd-capped Mg0.9Pd0.1 films of thicknesses 10 nm Pd and 40 nm Mg-Pd show a good hydrogen sensing property for hydrogen-containing atmosphere at room temperature. Their sensing range is from 40 ppm to 4% hydrogen in Ar. These films are supposed to be candidates for a low-cost room temperature hydrogen sensor.
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