Abstract:As a remote and in situ diagnostic technique for the first wall of tokamaks, laser-induced breakdown spectroscopy (LIBS) has shown promising potential for depth profile analysis of deposition layers on plasma-facing components (PFCs). However, due to the complexity of the interface of deposition layers and the limitations of laser profiles, achieving an accurate deposition layer thickness is often more difficult for an in situ LIBS system in tokamaks. In previous studies, a Laser Profile & Interface Roughness model (LPIR model), which considers the laser beam profile and interface roughness factors, has been developed to identify the interface of deposition layers. In this study, the effect of ablation rates from different materials in the deposited layers on the accuracy of their thickness has been investigated. The depth profiling of a Ni-Cu-Ni-Cu multilayer sample, which has a four-layer structure, has been carried out using the LIBS technique under different focusing conditions as well as various laser pulse energies, with the pressure maintained at 10-5 mbar. The LPIR model was used to reconstruct the depth distribution profile of the Ni-Cu-Ni-Cu multilayer sample and quantify the interfacial positions of the deposited layers. A layer thickness correction method for multilayer sample is proposed based on the dependence of the ablation rates of different layers on laser fluence. The correction ability has been evaluated based on the relative errors between the calculated and the scanning electron microscope (SEM) values for different layer thicknesses. The relative errors of the corrected layer thicknesses are all significantly improved, and the accuracy of the layer thicknesses has been substantially improved. The proposed method will not only help us better understand the LIBS depth profiling of multilayer samples under different laser fluence conditions, but it will also further improve the accuracy of the layer thickness analysis of multilayer samples. This result is of positive significance for the application of in situ LIBS diagnostics in plasma-wall interaction (PWI) studies. As a remote and in situ diagnostic technique for the first wall of tokamaks, laser-induced breakdown spectroscopy (LIBS) has shown promising potential for depth profile analysis of deposition layers on plasma-facing components (PFCs).

Depth Profiling of Metal Coating Circuit Board by Low Temperature Plasma-Inductively Coupled Plasma-Mass Spectroscopy System

Depth Profiling of Nanometer Coatings by Low Temperature Plasma Probe Combined with Inductively Coupled Plasma Mass Spectrometry.

Depth profiling of nanometer thin layers by pulsed micro-discharge with inductively coupled plasma mass spectrometry

Depth Profiling Of Nanometer Thin Layers By Laser Desorption And Laser Postionization Time-Of-Flight Mass Spectrometry

Depth profiling of tungsten coating layer on CuCrZr alloy using LIBS approach

Depth Profiling of TiN and Zinc Coatings on Steel with Glow Discharge Atomic Emission Spectrometry

Analysis Method of Heavy Metals in Printed Circuit Boards

Depth Profiling of Metallic Coatings Evaluated from Spatially-Resolved Measurement in Glow Discharge Optical Emission Spectrometry.

Phase transfer hollow fiber liquid phase microextraction combined with electrothermal vaporization inductively coupled plasma mass spectrometry for the determination of trace heavy metals in environmental and biological samples.

Hollow-fiber Liquid-Phase Microextraction Prior to Low-Temperature Electrothermal Vaporization ICP-MS for Trace Element Analysis in Environmental and Biological Samples.

Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis

Depth Profiling of Thin Films with Pulsed Glow Discharge Atomic Emission Spectrometry

Plasma diagnosis using Langmuir probe in PECVD coating machine

On-line Preconcentration and Separation of Co, Ni and Cd Via Capillary Microextraction on Ordered Mesoporous Alumina Coating and Determination by Inductively Plasma Mass Spectrometry (ICP-MS).

Characterization of multilayer coatings of aluminium, tungsten and molybdenum on steel substrate using laser-induced breakdown spectroscopy

Quantification of Trace Amounts of Impurities in High Purity Cobalt by High Resolution Inductively Coupled Plasma Mass Spectrometry

Study of the Layer Thickness of Multilayer Sample by the LIBS Method Based on Ablation Rate Correction

Experimental and model study of LIBS depth profile for multilayer deposition materials

LOW TEMPERATURE PLASMA PROBE AND METHODS OF USE THEREOF

Thickness Measurement Approach for Plasma Sprayed Coatings Using Ultrasonic Testing Technique

Uniformity Analysis of Metal Coatings on Conductive Glass by Cryogenic-Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry