The experimental research on the classification of air cleanliness for non-unidirectional flow cleanroom

Junjie Liu,Qun Ma,Haidong Wang,Jiancheng Qi,Yanju Li,Wei Sun
2008-01-01
Abstract:Usually the energy consumption of the cleanroom air-conditioning system is as 10 times as the general air-conditioning system. And because the faclility of cleanroom is running the whole year, the cleanroom air-conditioning system takes a great percentage of the total energy consumption in the factory. The supply air flow rate in the cleanrooms should be determined carefully to save the energy of air circulation. However the performance factors of cleanroom that influence the cleanroom air cleanliness play different roles. In order to study these factors, a full-scale cleanroom chamber testing method is used to test the actual cases. The factors taken into account in this study include: the indoor particle generation rate, the air changes per hour (ACH) rate, the airflow pattern, the room pressure difference, the location of the particle source and indoor surface material. From the experiments, we conclude the indoor particle generation rate and the air change rate are the most important factors to influence the indoor air particle concentration, and the other factors also influence the concentration slightly.
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