Research Progress On Hyperdoped Silicon Photodetectors Fabricated By Femtosecond Laser

进晓荣 Jin Xiaorong,吴强 Wu Qiang,黄松 Huang Song,贾子熙 Jia Zixi,宋冠廷 Song Guanting,周旭 Zhou Xu,姚江宏 Yao Jianghong,许京军 Xu Jingjun
DOI: https://doi.org/10.3788/LOP57.111430
2020-01-01
Laser & Optoelectronics Progress
Abstract:The photodetectors based on hyperdoped silicon exhibit advantages including high gain at low voltage, and broadband spectral response ranging from visible to near-infrared wavelengths. In this review, the mechanism of femtosecond laser hyperdoping is introduced, followed by the research progress on hyperdoped silicon photodetectors, especially the discussions on how to enhance device response, suppress dark current, improve lattice quality, and increase carrier mobility. Moreover, photodetectors arc introduced for flexible optoelectronic applications. At last, the development prospects of photodetectors based on femtosecond laser hyperdoped silicon arc forecasted.
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