Co-sputtered Pd/SnO2:NiO Heterostructured Sensing Films for MEMS-based Ethanol Sensors

Y. Wang,W. G. Tong,N. Han

DOI: https://doi.org/10.1016/j.matlet.2020.127924

IF: 3

2020-01-01

Materials Letters

Abstract:Here, we disclose the Pd-doped SnO2:NiO sensing films integrated on the microheaters by a facile co-sputtering method. The Pd content is controlled by the sputtering power, and thermal annealing at 500 degrees C in H-2 is implemented to activate the hybrid Pd/SnO2:NiO film. The 20 nm-thick Pd/SnO2:NiO films with Pd sputtering power of 20 W exhibits significantly enhanced ethanol sensing performance, with the response of 12 to 50 ppm ethanol, low detection limit of <5 ppm, high selectivity, good stability and low device-to-device variation of <15%. The gas sensing property enhancement can be predominantly attributed to the Schottky barrier at Pd-SnO2 interface and the Pd-induced catalytic oxidation of ethanol. These results enable the fabrication of wafer-scale micro ethanol gas sensors with low energy dissipation using the entire Micro-Electrical-Mechanical System (MEMS) strategy. (C) 2020 Elsevier B.V. All rights reserved.