325-400 GHz 2-D Beam Steering Antenna Based on MEMS Micromachining Technology

Jing Ning,Yu Jian Cheng,Yong Fan
DOI: https://doi.org/10.1109/imws-amp49156.2020.9199690
2020-01-01
Abstract:In this paper, a 2-D beam steering antenna based on a Rotman lens combined with a leaky-wave antenna is proposed. It works at THz band and employs the MEMS bulk micromachining technology to fabricate air-filled waveguides with high precision by selectively etching, gold plating and layer stacking. After combining the Rotman beamforming network with the frequency scanning antenna, the 2-D beam scanning is realized. According to the full-wave simulation results, the reflection coefficient is less than −10 dB for all beam ports within the frequency band of 325~400 GHz. At the central frequency, the multibeam scanning range is ±27°, with the maximum realized gain of 26.7 dBi. Moreover, the scanning beam corresponding to the center port covers a range of 14° over the upper half of the working band. The measured results, furthermore, are in good conformity with the simulated ones.
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