A MEMS Reconfigurable Air-Spaced Metamaterial Enabled Dynamic Terahertz Beam Steering

Zhenci Sun,Chao Liang,Ziqi Mei,Enze Zhou,Rongbo Xie,Rui You,Xiaomeng Bian,Xiaoguang Zhao,Jiahao Zhao
DOI: https://doi.org/10.1109/mems58180.2024.10439490
2024-01-01
Abstract:This paper reports a microelectromechanical system (MEMS) reconfigurable metamaterial based dynamic terahertz beam deflector enabled by changing the ultra-subwavelength air gap between the metallic resonator array and Au ground plane. In comparison to terahertz tunable metamaterials based on modifying the constituent material properties, our MEMS-based devices can improve THz beam steering efficiency and the modulation depth of deflection coefficient. The device was fabricated by a combination of the surface and bulk silicon micromachining processes. The MEMS reconfigurable air-spaced metamaterial (ASM) demonstrated may potentiate various applications, such as the next-generation wireless communication and space technology.
What problem does this paper attempt to address?