Ion Extraction and Collection Studied by Parallel Electrode Method on Considering Sputtering Loss

Gf Xie,Dw Wang,Ct Ying
DOI: https://doi.org/10.7498/aps.54.1543
IF: 0.906
2005-01-01
Acta Physica Sinica
Abstract:One-dimensional ion extraction and collection is studied by parallel electrode method using particle in cell-Monte Carlo collision (PIC-MCC) simulation. The energy and angle distribution of extracted ions is recorded and the sputtering loss is calculated. The results show that the extraction time and collision loss are decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases. The extraction time is decreased and the collection ratio is increased by increasing electron temperature, while the extraction time is increased and the collection ratio is decreased by increasing initialized plasma density; and the collision loss is decreased and the collection ratio is increased, if the target isotope concentration is higher. Improving the parallel electrode method leads to decreasing sputtering loss and increasing collection ratio greatly.
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