One-dimension Modeling on Parallel-plate Ion Extraction Process Based on Electron-equilibrium Fluid Model

Jian CHEN,Jinqiu XIANG,Heng GUO,Heping LI,Xing CHEN,Peng WANG,Junjie CHAI,Dongjun JIANG,Mingsheng ZHOU
DOI: https://doi.org/10.13336/j.1003-6520.hve.20170527011
2017-01-01
Abstract:Ion extraction is a complex physical process with multi-particle interactions and multi-field coupling.Studies concerning the effects of different parameters on the ion extraction characteristics are helpful to optimizing the operating parameters of the ion extraction processes.A one-dimension electron-equilibrium fluid model is derived from the physical-mathematical model for the non-equilibrium plasma transport properties to describe the motions of each component in a metal ion extraction process.The reliability of the preceding physical-mathematical model,as well as the computer codes,is verified by comparing with the analytical solutions and experimental data.Based on this model,studies are conducted on the ion extraction characteristics of metal plasmas,including the spatial-temporal evolution of the space charge sheath,the ion extraction time,and efficiency under different operating conditions.The modeling results show that there exists significant shielding effect in the ion extraction process when the initial plasma density is high.The increase in the applied voltage and the electron temperature or the decrease in the electrode gap spacing will shorten the extraction time.Although there are no obvious differences between the ion extraction times with or without consideration of the resonant charge transfer,the resonant charge transfer process will cause the loss of the target ions.
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