XPS Investigation of Upilex-S Polyimide Ablated by 355 Nm Nd:YAG Laser Irradiation

Kc Yung,Dw Zeng,Tm Yue
DOI: https://doi.org/10.1016/s0169-4332(00)00884-9
IF: 6.7
2001-01-01
Applied Surface Science
Abstract:Laser ablation of Upilex-S polyimide films 80μm thick was performed using a 355nm pulsed Nd:YAG laser. Nanoparticles redeposited at the ablated zone and at the edge of the hole were observed. Chemical and structural changes of the Upilex-S polyimide surface after 355nm laser irradiation in air were analyzed by X-ray photoelectron spectroscopy (XPS). Relative C content in the ablated zone was found to be higher, while both O and N contents were lower than in the untreated area. This indicates that laser irradiation released O and N atoms, and that the nanoparticles formed in the ablated zone consist mainly of carbon clusters. After deconvoluting the C 1s and O 1s spectra, three new components related to the carboxylate (OCO), ether (CO), and CO groups were detected in and around the ablated zone. In addition, one new component was found for O 1s spectra, and the peak at 288.2eV related to the imide carbonyl groups was shifted by 0.2–0.6eV. These effects are probably due to the oxidation and formation of a non-imide carbonyl group. At the edge of the hole enhanced oxidation was found: the C content was considerably lower than that in the ablated zone, and the C 1s peak was at 288.6±0.2eV. This suggests the formation of oxidized nano-particles, which carry the non-imide carbonyl groups. Based on these results, the decomposition of Upilex-S polyimide irradiated by UV light occurs via a photothermal ablation process.
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