Analysis and Simulation of Curved Bimorph Microactuators

Sagnik Pal,Huikai Xie
2010-01-01
Abstract:Difference in strains in the two layers of a bimorph causes it to curl, thereby leading to actuation. Thermal, piezoelectric and shape-memory alloy based straight bimorph actuators that undergo out-of-plane bending have been widely reported. We propose a new class of microactuators based on curved bimorphs and report their analysis for the first time. The distinguishing feature of curved bimorphs is that out-of-plane bending and twisting deformations are coupled. Analytical expressions for the vertical deflection and bimorph twist are obtained. The analysis is validated via finite-element simulations. The center of a micromirror-plate actuated by straight bimorphs shifts significantly during actuation. A novel design based on curved bimorph is proposed in which the mirror-plate center shift is only 0.4 μm for 13.5 degrees mirror tilt.
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