Nineteenth European Conference on Chemical Vapor Deposition , ( EUROCVD 19 ) Thermodynamic Analysis And Growth Of Zirconium Carbide By Chemical Vapor Deposition

Sun Wei,Hao Zheng Hua,Xiong Xiang
2013-01-01
Abstract:Equilibrium calculations were used to optimize conditions for the chemical vapor deposition of zirconium carbide from zirconium halide + CxHy+H2+Ar system. The results show the CVD-ZrC phase diagram is divided into ZrC+C, ZrC and ZrC+Zr zones by C, Zr generating lines. For the same mole of ZrCl4 reactant, it needs higher concentration of CH4 to generate single ZrC phase than that of C3H6. Using these calculations as a guide, single-phase cubic zirconium carbide coatings were deposited onto graphite substrate. © 2012 The Authors. Published by Elsevier Ltd. Selection and/or peer-review under responsibility of the Organizing Committee of EUROCVD 19.
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